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  • BROOKS GF100 series metal sealed thermal mass flow controller and instrument GF120
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  • BROOKS GF100 series metal sealed thermal mass flow controller and instrument GF100
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  • HORIBA UR-Z700 Series Digital Automatic Pressure Regulator

BROOKS 122 series mechanical pressure gauge C122

2024-05-15 

BROOKS 122 series mechanical pressure gauge C122

Reliable and efficient local pressure monitoring, suitable for high-purity applications
The design and development purpose of BROOKS Instrument 122 series mechanical pressure gauges is to meet the stringent requirements for high purity in semiconductor industry applications. The equipment is made of stainless steel material, characterized by an accuracy of up to 1% of the full range. The above two inch instruments are durable measuring equipment suitable for various process connections, pressure ranges, and installation directions, and can efficiently and reliably monitor local pressure.
characteristic
Stainless steel moving parts ensure precision
316L stainless steel liquid receiving parts
Instruments welded to anaerobic chambers to meet strict cleanliness and safety standards
Available in various models and pressure ranges to meet specific design requirements
advantage
Durable and efficient local pressure monitoring method
application
Gas conveying systems and tools for semiconductor processing, including:
Bulk gas
Gas cabinet
Gas distribution

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